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Vacuum compatible feedback stage - List of Manufacturers, Suppliers, Companies and Products

Vacuum compatible feedback stage Product List

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Vacuum-Compatible 1nm Feedback Stage FS-1040UPX(V)

Vacuum-Compatible 1nm Feedback Stage FS-1040UPX(V)

Stage with built-in linear encoder that can be used in a vacuum with 1nm resolution.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. The operating range is 40mm, allowing positioning and movement with a single unit. It incorporates a self-developed linear scale, resulting in a slim and lightweight design, and offers high-precision repeat positioning performance through full closed-loop control, featuring characteristics comparable to those for atmospheric use.

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Vacuum-compatible 1nm feedback stage FS-1020UPX(V)

Vacuum-compatible 1nm feedback stage FS-1020UPX(V)

【Usable in a vacuum】High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be used inside a vacuum chamber. Due to the built-in linear encoder, it has high-precision repeat positioning performance through closed-loop control.

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Vacuum-compatible 1nm feedback stage FS-1050UPX(V)

Vacuum-compatible 1nm feedback stage FS-1050UPX(V)

[Vacuum Compatible] High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control, possessing characteristics equivalent to those for atmospheric use.

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Vacuum-compatible 10nm feedback stage with 20mm operation.

Vacuum-compatible 10nm feedback stage with 20mm operation.

High-performance positioning stage with a built-in linear encoder operating at 10nm resolution, usable in a vacuum.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It has a built-in optical linear encoder, and based on the position information detected by the encoder, it performs full closed-loop control, resulting in high-precision repeatability in positioning. It can achieve positioning with a 20mm stroke and a resolution of 10nm.

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Vacuum-compatible submicron feedback stage with 20mm operation

Vacuum-compatible submicron feedback stage with 20mm operation

Feedback stage with submicron resolution usable in a vacuum.

The built-in optical linear encoder detects the position of the stage table and feeds the position information back to the controller, resulting in high resolution and excellent position reproducibility. Since it is driven by a stepping motor and ball screw, it has excellent position retention. As a countermeasure against outgassing, lubricants, wires, and motors have been replaced with vacuum-compatible products, allowing for use within a vacuum chamber. It can operate within a range of 20mm and can be controlled with a resolution of "50nm" or "100nm" (depending on the controller).

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Vacuum-compatible 5nm feedback stage, 50mm operation.

Vacuum-compatible 5nm feedback stage, 50mm operation.

High-performance positioning stage with 5nm resolution, high reproducibility, and high retention that can be used in a vacuum.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control. It can operate with a 50mm stroke at a resolution of 5nm.

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Vacuum-compatible 5nm feedback stage, 40mm operation

Vacuum-compatible 5nm feedback stage, 40mm operation

High-performance positioning stage with 5nm resolution and 40mm travel, usable in a vacuum.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It has a built-in linear scale developed in-house, providing high-precision repeat positioning performance through full closed-loop control. It can operate with a 40mm stroke at a resolution of 5nm.

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Vacuum-compatible 10nm feedback stage, 40mm operation

Vacuum-compatible 10nm feedback stage, 40mm operation

High-performance positioning stage operating in a 40mm range with 10nm resolution for vacuum applications.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It features full closed-loop control based on the positional information from an integrated optical linear encoder, providing high-precision repeatability in positioning performance. It can operate with a 40mm stroke at a resolution of 10nm.

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Vacuum-compatible 10nm feedback stage, 100mm operation

Vacuum-compatible 10nm feedback stage, 100mm operation

Long stage with built-in linear encoder capable of 10nm resolution, usable in a vacuum.

This is a vacuum-compatible feedback stage equipped with outgassing countermeasures. It can be directly introduced into a vacuum chamber. It has a built-in optical linear encoder, and based on the position information detected by the encoder, it performs full closed-loop control, providing high-precision repeat positioning performance. With a movement range of 100mm, it allows for sample movement and precise positioning with a single unit, making it effective when a wide range of data (such as spectra) is required.

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Vacuum-compatible 10nm feedback stage, lifting type

Vacuum-compatible 10nm feedback stage, lifting type

Vacuum-compatible positioning stage for the Z-axis with a built-in linear encoder and 10nm resolution.

This is a high-resolution Z-axis positioning stage equipped with an optical linear encoder. It offers a resolution of 10nm with stroke options of 5mm or 10mm. It has been designed to mitigate outgassing, making it usable in a vacuum. The structure minimizes changes in the tilt of the table surface, and with our proprietary linear encoder and unique feedback control circuit, it provides high resolution, excellent positioning repeatability, and position retention after positioning.

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Vacuum-compatible 10nm feedback stage, micro-rotation type

Vacuum-compatible 10nm feedback stage, micro-rotation type

Micro-rotation stage with an encoder that operates with a minimum resolution of 0.00001° and ±4° in vacuum conditions.

This is a high-resolution micro-rotation stage equipped with an optical linear encoder. It has a resolution of 0.00001° and a stroke of ±4°. It has been treated for outgassing and can be used in a vacuum. It is suitable for adjusting the rotation direction.

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